MPG40x Inverted Magnetron / Pirani Gauge - ATM to Ultra High Vacuum

MPG40x Inverted Magnetron / Pirani Gauge - ATM to Ultra High Vacuum

The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar toatmosphere (3.8 x 10-9 Torr to atmosphere). Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.

Benefits

  • Combination gauge – Inverted Magnetron & Pirani
  • Wide measurement range from 5 x 10-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  • FPM or metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

Typical Applications

  • High vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range