BCG450 Triple Gauge - ATM to Ultra High Vacuum

BCG450 Triple Gauge - ATM to Ultra High Vacuum

The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (Triple-Gauge™), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3.75×10-10 to 1125 Torr). The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.

Benefits

  • BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
  • Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
  • Pirani interlock protects the hot filament from premature burnout
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
  • Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
  • Optional graphic display and Fieldbus interfaces available
  • RoHS compliance

Typical Applications

  • Pressure measurement in Semiconductor process, transfer and loadlock chambers
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range

Part Number Description
353-550 BCG450 DN 25 ISO-KF
353-561 BCG450 TripleGauge; DN 25 ISO-KF; Baffle
353-551 BCG450 DN 40 CF-R
353-552 BCG450 LCD, DN 25 ISO-KF
353-553 BCG450 LCD, DN 40 CF-R
353-554 BCG450-SP PBus, DN 25 ISO-KF
353-556 BCG450-SP PBus, DN 40 CF-R
353-557 BCG450-SD DNet, DN 25 ISO-KF
353-558 BCG450-SD DNet, DN 40 CF-R
353-592 BCG450-SE ECAT, DN 25 ISO-KF
353-593 BCG450-SE ECAT, DN 40 CF-R