BAG402 Medium to Ultra High Vacuum Hot Ion Gauge

BAG402 Medium to Ultra High Vacuum Hot Ion Gauge

The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package. The unique, supported dual filaments offer superior accuracy, long term stability and longevity.

Benefits

  • Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • Overpressure detection protects the filament from premature burnout
  • Two long-life yttrium oxide coated iridium filaments
  • Automatic emission current selection reduces control complexity
  • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
  • RoHS compliance

Typical Applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

Part Number Description
353-600 BAG402 DSUB9 KF25
353-601 BAG402 DSUB9 CF40