'Stripe' High Speed Heated Capacitance Diaphragm Gauges

'Stripe' High Speed Heated Capacitance Diaphragm Gauges

INFICON Stripe high-speed Capacitance Diaphragm Gauges are the fastest, highly accurate vacuum measurement instruments available. With a less than 2 ms response time combined with the EtherCAT fieldbus interface it opens up a total new field of applications. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Stripe comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. INFICON Stripe using an innovative heating concept, which provides a cool to the touch surface, and its unique speed capabilities,enabling an unprecedented productivity increase, making it the most advanced vacuum instrument of its kind.

Benefits

  • High productivity – Faster than 2ms response time (FS > 50 mTorr)
  • Flexible integration – EtherCAT fieldbus
  • Long lifetime – Proven ceramic sensor
  • Forget recalibration – 90ppm/year full scale stability

Typical Applications

  • Atomic layer deposition
  • High speed process control
  • PVD, CVD, Etch
  • General high temperature vacuum applications

Part Number:

45degC: