PS3 Monotorr Heated Getter Gas Purifier - 0.2 to 5 l/min

PS3 Monotorr Heated Getter Gas Purifier - 0.2 to 5 l/min

Rare Gas/Nitrogen Purification - PS3-MT3

PS3-MT3 - Heated Getter PurifierResearch has shown that gas purification ensures consistent and repeatable process performance for semiconductor device manufacturing. Point of Use Purification isolates critical process areas from house gas distribution systems and protects against gas purity upsets and cross-contamination.

The MonoTorr purifiers provide essential purification for Nitrogen and Rare Gases at flow rates up to 5 slpm. The all metal getter material removes impurities to < 1 ppb (refer to chart below).

Features

  • Fully automatic controller with fault protection and audible alarm
  • 0.003 µm stainless steel particle filter
  • Low cost of ownership
  • Replaceable cartridge

PS3-MT3 Outlet Performance
Gases Purified Impurities Removed Outlet Performance
N2 H2O, O2, CO, CO2, H2, CH4 < 1 ppb
He, Ar, Xe H2O, O2, CO, CO2, H2, CH4, N2 < 1 ppb

Note: Purifiers are gas specific and should only be used for the gas indicated

Purifier Lifetime Information

Ordering Information

Part Number Gas Purified Power
PS3-MT3-R-1 He, Ar, Xe 110-120 VAC
PS3-MT3-N-1 N2 110-120 VAC
PS3-MT3-R-2 He, Ar, Xe 220-240 VAC
PS3-MT3-N-2 N2 220-240 VAC

Optional Equipment

BYPS-3 Bypass assembly
PS3-APIMS APIMS certification to 1 ppb

Spare Parts (Replacement cartridges are field replicable)

PF3-C3-R-1 He, Ar, Xe 110-120 VAC
PF3-C3-N-1 N2 110-120 VAC
PF3-C3-R-2 He, Ar, Xe 220-240 VAC
PF3-C3-N-2 N2 220-240 VAC