SFM4100 Mass Flow Meter

SFM4100 Mass Flow Meter

Versatile Flow Sensor

Designed for anaesthesia equipment, the CMOSens® mass flow meter SFM4100 precisely measures air and other non-aggressive gases. It provides an impressively wide dynamic measuring range up to 20 slm. The sensor unit has a digital I2C interface, provides a fully calibrated and temperature compensated output signal, and operates reliably at pressures of up to 7 bar.

Its outstanding long-term stability makes the SFM4100 first choice for products that require a high rate of deployment with long service intervals. For OEM projects, more than one gas calibration can be stored simultaneously in each sensor device. Self-test features allow testing of the entire signal chain (from capture of the analogue signal through digital signal chain) while the mass flow meter is in use. This makes the SFM4100 an optimal solution for safety-critical applications.


  • Measurement of flow rates from 0 to 20 l/min
  • No drift
  • Wide dynamic range (1:500)
  • Digital I²C interface
  • Digitally calibrated and temperature compensated
  • Multigas Option


  • Anaesthesia, inhalers and other medical instruments
  • Analytical equipment
  • Process Automation