SFM3100 Respiratory Flow Meter

SFM3100 Respiratory Flow Meter

Analog Flow Sensor for Respiratory Applications

The analog mass flow meter SFM3100 is highly accurate and fast. The SFM3100 has a compact design and can be easily integrated into existing devices. There is a temperature sensor in the gas channel of the flow meter. This enables highly precise temperature compensation and obviates the need to integrate a dedicated temperature sensor.

The SFM3100 measures flow ranges between -24 and +240 slm. It can also detect negative flow ranges, thereby recognizing errors or impeded flows in a reliable manner. At the same time, multiple gases are compensated with great precision. The flow rates and signal characteristics can be customized to meet customer-specific requirements.

Like all Sensirion sensors, the analog mass flow sensor is based on the patented CMOSens® Technology, which combines the sensor and analysis electronics on a single microchip. The result is a highly stable and precise system for demanding and cost-sensitive applications. The SFM3100 is particularly suitable for inspiration applications as well as for mixing oxygen and air to a very precise degree.


  • Flow range: -24 to +240 slm
  • Accuracy 5% m.v. (typ.)
  • Ultra-fast response time
  • Low pressure drop < 16mbar @ 200slm (typ.)
  • Temperature sensor integrated
  • Compact design, easy integration
  • Gas compensation
  • Detection of errors and impeded flows
  • Customized flow rates and signal characteristics
  • Analog output
  • Fully calibrated and temperature compensated


  • Ventilation (Inspiratory)
  • Gas Mixture
  • Inhalers