HFM-D-300 flow meter / HFC-D-302 flow controller

HFM-D-300 flow meter / HFC-D-302 flow controller

30x-D-Series mass flow instruments have flow ranges from 0-5 sccm to 0-10,000 slm; use all metal seals on certain models, provide analog and digital outputs, and are constructed of stainless steel.

The Hastings 30x-D offer many enhanced features such as self diagnostics of the sensor and valve, auto zero feature, multi range and gas calibration storage, simple communications with control/logging software and totaliser.

± (0.5% of reading + 0.2% of full scale) Accuracy for <3,000 slm

Features
• +/- (0.5% of reading + 0.2% of Full Scale)
• Proven Reliability
• Range 5 sccm to 10,000 slm(N2 Equivalent)
• Built in Totalizer
• Automatic Zeroing

Applications
• University Research
Leak Testing
• Vapor Deposition
Pharmaceutical Processes
• R&D And Process Flows
• Semiconductor Processes
• Gas Blending
Thermal Flame Spray

HFM-D-300A Meter HFC-D-302A Controller
Range 0 - 5 sccm to 0 - 25 slm (N2) 0 - 5 sccm to 0 - 25 slm (N2)
Accuracy + (0.5% of reading + 0.2% of full scale) + (0.5% of reading + 0.2% of full scale)
Repeatability + 0.15% of F.S. + 0.15% of F.S.
Maximum Working Pressure 500 PSIG (Optional 1000 PSIG) 500 PSIG (Optional 1000 PSIG)
Settling Time Typically <1 seconds Typically <1 - 2 seconds
Analog I/O (Standard) 0 - 5 VDC 0 - 5 VDC
Analog I/O (Optional) 0 - 10 VDC, 0 - 20 mA, 4 - 20 mA 0 - 10 VDC, 0 - 20 mA, 4 - 20 mA
Digital I/O (Standard) RS-232, RS-485 RS-232, RS-485
Analog Connector 15-pin subminiature D 15-pin subminiature D
Digital Connector Dual RJ-12 Dual RJ-12
Power Requirements 11 - 36 VDC @ 3.1 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC) 11 - 36 VDC @ 6.7 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC)
Wetted Materials 316L SS, Nickel 200, 304 SS, 302 SS 316L SS, Nickel 200, 302 SS, 304 SS, Kalrez® (Valve Seat)