SMC Pneumatics High Vacuum L-Type Valves Series XL Series XLA     Series XLC     Series XLH

Series Description Flange Size Ref. 16 25 40 50 63 80 XLA Bellows Seal Type (spring return) XLC Bellows Seal Type (double acting) XLH Bellows Seal Type (manual operation) - -

Auto Switch Options Heater Options -X3 Oxalic Acid Anodising Maintenance Procedure

Series XLA
Spring Operation provides positive shut off under air failure conditions to ensure integrity of process tool vacuum chamber. Features 6 Body sizes Standard and high temperature versions 3 Heater options Visual position indicator standard Solid state and reed type switch options Built in magnet standard	Technical Specification
	Actuation Type	Air open, Spring close
	Vacuum Range	Atmosphere to 7.5 x 10-9 Torr, 1 x 10-6 Pa
	Helium Leak Rate	Main seal: 1 x 10-9 Torr l/s, 1.3 x 10-10 Pa m3/s Body: 1 x 10-10 Torr l/s, 1.3 x 10-11 Pa m3/s
	Operating Pressure	0.4 to 0.7MPa
	Operating Temperature	Standard: 5 ~ 60°C High Temp: 5 ~ 150°C (without auto switch)
	Max. Instant Pressure to Bellows	0.2MPa
	Body	Aluminium Alloy 6063
	Bellows	Stainless Steel AM 316
	Vacuum Valve Seal	Viton®* O-ring
	External Seal	NBR standard Viton®* for high temp (option)
	Surface Treatment	Hard anodised external Alcohol machined internal
	Position Indicator	Mechanical - orange colour standard Electrical - solid state or reed switch option
	Rated Heater Voltage	115 VAC, 60Hz (option)
	Mounting Position	Any orientation
*Viton® is a registered trademark of DuPont Elastomers

Series XLC
Positive pressure operation provides execution of process steps in thin film coating applications. Features 6 Body sizes Standard and high temperature versions 3 Heater options Solid state and reed type switch options Built in magnet standard	Technical Specification
	Actuation Type	Double acting air operated
	Vacuum Range	Atmosphere to 7.5 x 10-9 Torr, 1 x 10-6 Pa
	Helium Leak Rate	Main seal: 1 x 10-9 Torr l/s, 1.3 x 10-10 Pa m3/s Body: 1 x 10-10 Torr l/s, 1.3 x 10-11 Pa m3/s
	Operating Pressure	0.3 to 0.6MPa
	Operating Temperature	Standard: 5 ~ 60°C High Temp: 5 ~ 150°C (without auto switch)
	Max. Instant Pressure to Bellows	0.2MPa
	Body	Aluminium Alloy 6063
	Bellows	Stainless Steel AM 316
	Vacuum Valve Seal	Viton®* O-ring
	External Seal	NBR standard Viton®* for high temp (option)
	Surface Treatment	Hard anodised external Alcohol machined internal
	Position Indicator	Electrical - solid state or reed switch option
	Rated Heater Voltage	115 VAC, 60Hz (option)
	Mounting Position	Any orientation
*Viton® is a registered trademark of DuPont Elastomers

Series XLH
Simplicity of use and vacuum seal integrity. Features 4 Body sizes 3 Heater options Visual status indicator Simple operation Constant sealing force	Technical Specification
	Actuation Type	Manual
	Vacuum Range	Atmosphere to 7.5 x 10-9 Torr, 1 x 10-6 Pa
	Helium Leak Rate	Main seal: 1 x 10-9 Torr l/s, 1.3 x 10-10 Pa m3/s Body: 1 x 10-10 Torr l/s, 1.3 x 10-11 Pa m3/s
	Operating Pressure	0.1 to 0.5MPa
	Operating Temperature	5 ~ 150°C
	Max. Instant Pressure to Bellows	0.2MPa
	Body	Aluminium Alloy 6063
	Bellows	Stainless Steel AM 316
	Vacuum Valve Seal	Viton®* O-ring
	External Seal	NBR
	Surface Treatment	Hard anodised external Alcohol machined internal
	Position Indicator	Mechanical - orange colour standard
	Rated Heater Voltage	115 VAC, 60Hz (option)
	Mounting Position	Any orientation
*Viton® is a registered trademark of DuPont Elastomers

Series XL Heater Options

Heater option for XLA/XLC (high temperature type)
Optional specifications	Symbol	XL*-16	XL*-25	XL*-40	XL*-50	XL*-63	XL*-80
150°C Max ambient	H0
80°C	H1	-
100°C	H2	-	-
120°C	H3	-
Note:Heater must be mounted at the time of purchase The valve body is heated with a thermistor at approximate fixed temperatures of 80°C, 100°C, 120°C. The type and number of thermistor will depend on the valve size and the fixed temperature. The bonnet assembly can withstand temperatures to 150°C.

Heater option for XLH (high temperature type)
Optional specifications	Symbol	XLH-16	XLH-25	XLH-40	XLH-50
Indicator	A
80°C	H1	-
100°C	H2	-	-
120°C	H3	-
Note: Heater must be mounted at the time of purchase

Series XL -X3 Oxalic Acid Anodising

The aluminium body is treated with special anodising using oxalic acid. This method eliminates helium penetration and provides excellent durability in heating cycles.

The following gases have been tested and approved for use with the Oxalic Acid anodised treatment.

Series XL Maintenance Procedure

Simplicity of design and construction enables even the most complex maintenance routine to be carried out on the series XL High Vacuum Valves without the necessity for removal from the vacuum exhaust line.

It is recommended that valves are broken down and reassembled in an environment that minimises the possibility of contamination from particulates.

The operating mechanism for the series XL High Vacuum Valves is secured to the Main Body, Detail 2, by means of 4 caphead hexagon screws located on the top face of the Bonnet Assembly, Detail 1.

Loosen each screw before releasing it in turn from the tapped holes in the body and remove from the assembly. Store these safely during maintenance to prevent damage to the threads.

Remove the Bonnet Assembly from the Main Body. Care should be taken when handling the assembly to prevent damage to sealing faces.

The main seals can be replaced by extracting them from their location grooves using a soft edged tool.

Should it be necessary the complete Bonnet Assembly can also be changed if the Bellows Seal is not functioning correctly.

The 'O'-ring grooves may be cleaned with pure alcohol prior to seating the new seals.

The complete Bonnet Assembly can now be inserted into the Main Body, ensuring it is in the correct orientation.

Replace the 4 cap screws and tighten two opposing diagonal cap screws first followed by the remaining two.