Gas Handling

Left Dropshadow

Heated Gas Purifiers Open

Maximum flow rate : 150 slpm

Gases Purified : Hydrogen, Nitrogen and rare gases

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Maximum flow rate : 100 slpm

Gases purified : Oxygen

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Maximum flow rate : 200 sccm

Gases purified : Helium, Nitrogen, Argon

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Maximum flow rate : 5 slpm

Gases purified : Hydrogen, Nitrogen, Argon, Helium and other rare gases

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Unheated Gas Purifiers Open

Maximum flow rate : 75 slpm

Gases purified : N2, Ar, He, Xe, Ne

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Maximum flow rate : 1000 slpm

Gases purified : see data sheet

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Gas Panel Manufacture Open

Chell Ultra Fine Needle Valves Open

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Right Dropshadow