Chell Instruments
 

IONISATION GAUGE ELECTRONICS AND GAUGE TUBES


PDF Data sheet download (221kB)

FEATURES
• Range — 10-10 Torr to 10-2 Torr
• Miniature Bayard-Alpert Style Package
• 24 VDC Input (11.5 VDC – 30 VDC)
• Bright LED Display
• RS232/485 Communication
• Two Independent TTL Setpoints
• Automatic or Selectable Emission Current
• Dual Filaments with Status Indicators
• Precision Electrometer
• Automatic High Pressure Shutdown
• Stable Accurate Electrode Voltages
• CE Compliant: EN61326
• System Connection Options Include KF, Mini-Conflat and Smooth Tube

APPLICATIONS
• Thin Film Coating
•Plasma Processing
•Vacuum Furnace
• Sputtering
• Calibration Systems
• Accelerator
• Lighting Manufacturing
• CVD

DESIGN FEATURES
The Teledyne Hastings Instruments IGE-3000 line of Ionisation Gauge Tubes and Electronics provides the user with accurate, repeatable pressure measurement starting in the medium vacuum range and continuing through into the ultrahigh vacuum range. A complete measurement system consists of a dual-filament miniaturized Bayard-Alpert ionisation gauge tube and electronics package.

The gauge tube includes several innovations over conventional Bayard-Alpert tubes. For example, the filaments are precisely tensioned to give repeatable performance. In addition, all tube materials are selected and processed to yield consistent structural integrity.

The electronics package consists of four PC boards. The first board contains a precision electrometer which is capable of measuring ion currents to 1 pA. This board also contains a highly stable anode supply and filament drive circuit.

The second board is a power supply board which contains power conversion circuits for the entire electronics package. Utilizing a separate board ensures that the precision electronics of the first board are isolated from power conversion noise.

A CPU board contains the instrument’s firmware. Calibration coefficients are stored on a memory chip; calibration services are available.The top PC board contains a bright LED display and gauge status indicators. An intuitive user interface makes the gauge very easy to use.



For further information please contact us or download the PDF Data sheet download (221kB)
Chell Instruments