General Features

• Covers the range of 0 to 15 kPa (113 Torr) in gauge, absolute differential and absolute modes.
• Resolution to 1 mPa (0.0075 mTorr, 0.000004 in. H2O).
• Measurement uncertainty to: ± (5 mPa + 30 ppm of reading) in gauge and absolute differential mode, ± (8 mPa + 30 ppm of reading) in absolute mode.
• Force balanced piston gauge operating principle with non-rotating piston.
• Independent gas lubrication of 1 to 6 micron conical piston-cylinder gap centers piston with very low gas flow (< 1 sccm).
• Load cell operates in controlled pressure and humidity environment, not in reference vacuum.
• Load cell zero and span calibration can be performed automatically, in any measurement mode.
• Fully automated operation including pressure control and DUT data acquisition allows multi-increment tests to be run unattended. Integrated thermal transpiration correction available when needed.
• Adjustable dwell and averaging times.
• Complete PC based user interface, continuously monitors and displays instrument conditions, alerts to significant changes in ambient and instrument conditions.

For full specification please download the PDF data sheet (527kb).